Nanoscale Standards by Metrological AFM and Other Instruments
- Ichiko Misumi
- May 2021
- Practical guide for users and practitioners
- Puts nanoscale standards in a practical context
- Covers a range of measurement modalities
- 2D and 3D measurements.
Dr Misumi graduated with a degree in precision machinery engineering, from the University of Tokyo in 1996 and obtained her Doctor of Engineering from the University of Tokyo in 2004. She joined the National Research Laboratory of Metrology (NRLM) in 2000. In 2001, NRLM was renamed the National Metrology Institute of Japan (NMIJ). She received 'Outstanding Precision Measurement Paper Award 2005' from Measurement Science and Technology, Institute of Physics (IOP), and 'Highly Commended Paper Award 2007', again from Measurement Science and Technology, Institute of Physics (IOP). She also received 'Award for Science and Technology (Development Category), The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology' in 2011.
Table of Contents
Hardback ISBN: 9780750331890
Ebook ISBN: 9780750331913
Publisher: Institute of Physics Publishing